Thermal Processing and Measurements at the Micrometer and Nanometer Scales William P. King Assistant Professor Woodruff School of Mechanical Engineering Georgia Institute of Technology Wed., Sept. 8, 2004 Lecture Rm. 5, 3:00 PM Abstract: This talk describes MEMs tools for thermal processing and thermal measurements, in the range of 10 nm - 50 um. The main tool of interest is an atomic force microscope cantilever tip fabricated with an integrated heater. The cantilever can achieve temperatures as high as 700 C and with a heating duration as short as 1 usec. When the tip is in contact with a substrate, the substrate is heated only at the area of contact, which has a diameter as small as 1 nm. Thus, the heated cantilever is the smallest ever controlled heating source and is an excellent tool for studying thermal transport at the nanometer scale. This talk describes fabrication, modeling, and measurements of these cantilevers and related tools including their use for nanofabrication, processing of polymers, metals, and biomaterials, thermal measurements in microelectroncics, and measurements of micron-scale liquid jets. William P. King received his Ph.D. from Stanford University in 2002. From 1999-2001 he spent 1.5 years as a member of the research staff at the IBM Zurich Research Laboratory, working in the group of Nobel Laureate Gerd Binnig on "Millipede" thermomechanical data storage. Since 2002 he has been Assistant Professor of Mechanical Engineering in the Woodruff School of Mechanical Engineering, where he supervises 10 graduate students. He is the winner of the NSF CAREER award.